DIFFERENTIAL PRESSURE SENSOR

摘要

Provided is a differential pressure sensor capable of measuring pressure fluctuations using a simple configuration. The differential pressure sensor comprises a main body in which an air chamber and an opening connecting the inside and the outside of the air chamber are formed, and a detection unit provided in the opening. The differential pressure sensor is characterized in that the detection unit has a cantilever section provided so as to be capable of tilting to close the opening, and in that a piezoresistive layer is formed in the cantilever section.