| 发明名称 |
STRESS SENSOR FOR IN-SITU MEASUREMENT OF PACKAGE-INDUCED STRESS IN SEMICONDUCTOR DEVICES |
| 摘要 |
A stress sensor is disclosed herein. The stress sensor includes a plurality of carbon nanotubes in a substrate, and first and second contacts electrically connectable with the plurality of carbon nanotubes. Methods of making and using the stress sensor are also disclosed. |
| 申请公布号 |
US2012193734(A1) |
申请公布日期 |
2012.08.02 |
| 申请号 |
US201213444786 |
申请日期 |
2012.04.11 |
| 申请人 |
INTEL CORPORATION |
发明人 |
FARAHANI MOHAMMAD M.;NOVESKI VLADIMIR;PATEL NEHA M.;RARAVIKAR NACHIKET R. |
| 分类号 |
H01L29/84;B82Y40/00;B82Y99/00;G01B7/16;H01L21/02 |
主分类号 |
H01L29/84 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
