发明名称 |
ILLUMINATING APPARATUS, PATTERN INSPECTION APPARATUS, AND METHOD OF FORMING ILLUMINATING LIGHT |
摘要 |
An illuminating apparatus includes a rotating phase plate having a height equal to or less than a wavelength of light from a light source and including a plurality of randomly arranged step regions so as to change a phase of light from the light source by allowing the light beam to pass therethrough; and a fly's eye lens including an array of a plurality of lenses configured to pass the light beam passed through the rotating phase plate, wherein a portion in which a product of a maximum size of the plurality of step regions and an optical magnification from the rotating phase plate to a plane of incidence of the fly's eye lens is equal to or less than an arrangement pitch of the plurality of lenses and a portion in which the product is larger than the arrangement pitch of the plurality of lenses are mixed.
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申请公布号 |
US2012189032(A1) |
申请公布日期 |
2012.07.26 |
申请号 |
US201213351555 |
申请日期 |
2012.01.17 |
申请人 |
OGAWA RIKI;NUFLARE TECHNOLOGY, INC. |
发明人 |
OGAWA RIKI |
分类号 |
H01S3/08 |
主分类号 |
H01S3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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