LIGHT EMITTING DEVICES WITH ACTIVE LAYERS THAT EXTEND INTO OPENED PITS AND MANUFACTURING METHODS THEREOF

摘要

PROBLEM TO BE SOLVED: To provide light emitting devices with active layers that extend into opened pits and manufacturing methods thereof.

SOLUTION: Light emitting devices include an active region comprising a plurality of layers and a pit opening region on which the active region is disposed. The pit opening region is configured to expand a size of openings of a plurality of pits to a size sufficient for the plurality of layers of the active region to extend into the pits. The active region comprises a plurality of quantum wells. The pit opening region comprises a superlattice structure. The pits may surround their corresponding dislocations and the plurality of layers may extend to the respective dislocations. At least one of the plurality of pits originates in a layer disposed between the pit opening layer and a substrate on which the pit opening layer is formed. The active region may be a Group III nitride based active region. Methods of manufacturing such devices are also provided.

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