| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance exhaust capacity inside a machining chamber and a washing chamber without enlarging an exhaust device. <P>SOLUTION: A machining device includes: a chuck table mechanism 3 for sucking and holding a workpiece; a first and second cutting units 71, 72 provided with blades 711, 721 for machining the workpiece held by the chuck table mechanism 3, and spindles 712, 722 having an air bearing for supporting the blades 711, 721 rotatably; and the working chamber 100 for covering a work point where the blades 711, 721 work on the workpiece. The machining device has ejectors 111, 112 for generating suction power in the working chamber 100 in exhaust passages 713, 723 for the air used in the chuck table mechanism 3 or the air bearings of the first and second cutting units 71, 72. <P>COPYRIGHT: (C)2012,JPO&INPIT |
