| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a roughness measuring device capable of measuring roughness of a rough surface having large irregularities in short time without being affected by moisture on the surface to be measured by employing a non-contact and non-optical simple structure. <P>SOLUTION: A roughness measuring device 1a for measuring surface roughness of a measured object 2 comprises: a roughness sensor using a prescribed region on a surface of the measured object 2 as a measurement area for outputting a signal corresponding to surface roughness of the measurement area; and a roughness detection part for outputting a measurement vale of the surface roughness of the measurement area on the basis of the output of the roughness sensor. The roughness measuring device 1a thus constructed can measure the surface roughness of the measured object 2 in a non-contact and non-optical method. <P>COPYRIGHT: (C)2012,JPO&INPIT |
