发明名称 Measuring probe having one or more support elements for a measuring instrument
摘要 <p>A measuring probe for a measuring instrument comprises a body having an elastic mode of oscillation, a measuring tip connected to the body, an actuator adapted to excite the elastic mode of oscillation of the body and at least one support element adapted for attachment of the body to another component of the measuring instrument. The at least one support element is connected to the body at one or more regions of attachment. Each of the one or more regions of attachment has a line of intersection with a plane intersecting each of the one or more regions of attachment and an extension in a direction perpendicular to the plane. The extension in the direction perpendicular to the plane is less than a length of the line of intersection. The measuring probe can be inserted between the objective lens of an optical far field microscope and an object to be investigated.</p>
申请公布号 EP2120036(B1) 申请公布日期 2012.07.18
申请号 EP20080009131 申请日期 2008.05.16
申请人 MITUTOYO CORPORATION;BUNDESREPUBLIK DEUTSCHLAND ENDVERTRETEN DURCH DENPRAESIDENTEN DER PHYSIKALISCH-TECHNISCHEN BUNDESANSTALT 发明人 DANZEBRINK, DR. HANS-ULLRICH;HIDAKA, KAZUHIKO;ILLERS, HARTMUT;SAITO, AKINORI
分类号 G01Q70/04;B82Y35/00;G01Q30/02 主分类号 G01Q70/04
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