| 摘要 |
PURPOSE: A material analysis tool using X-rays is provided to figure out a structure of a sample having various properties and shapes because an X-ray generating unit and an X-ray detecting unit has displacement in a front direction on the same plane and a table is rotated and vertically moved and tilted. CONSTITUTION: A material analysis tool using X-rays comprises a base frame, a first arm(110), a second arm(210), a shaft supporting unit, a first driving unit, a second driving unit, and a table module. The base frame comprises a back frame of a stand-up plate shape. The first arm is arranged in a front side of the back frame. One end part of the first arm supports an X-ray generating unit and the base frame supports a first shaft in the other end part of the first arm. The second arm is arranged in the front side of the back frame and supports a detecting unit in one end side and the base frame supports the second shaft in the other end side of the back frame. The shaft supporting unit is coaxially arranged by penetrating the back frame around a sample seated on the table and rotates and supports the first and second shafts. The first and second driving units respectively drive the first and second shafts and independently rotate the first and second arms around the table by being arranged in the rear side of the base frame, thereby changing an incident angle and scattering angle of the X-rays. |
