| 摘要 |
An image acquisition apparatus 1A includes a sample stage 10 for placing a sample S thereon, an image pickup device 20 capable of acquiring a two-dimensional image and TDI driving, an image pickup optical system 30 including an objective lens 32, a scanning unit for acquiring an observation image while scanning the sample S by the image pickup device 20 and the image pickup optical system 30, and a focus oscillation control device 40 for controlling oscillation of a focus in the sample S so that an image pickup focus in the sample S oscillates at an oscillation frequency fs in an optical axis direction. The focus oscillation control device 40 sets the oscillation frequency fs so that the oscillation frequency fs substantially coincides with Ns times (Ns is an integer not less than 1) the basic frequency, which is a reciprocal 1/Ti of an image pickup period Ti of TDI driving in the image pickup device 20. Thus, an image acquisition apparatus capable of efficiently acquiring an observation image with focus extended can be realized. |
