发明名称 |
Method for Manufacturing Piezoelectric Vibration Device |
摘要 |
A method for manufacturing a piezoelectric vibration device wherein a substrate is prepared, and a piezoelectric resonator element is mounted on the substrate. Before or after a packaging member is joined to the substrate, the piezoelectric resonator element is exposed to an environment at a higher temperature than ambient temperature and a higher humidity than ambient humidity, and then an electrical property is measured to detect attachment of dust and/or foreign matter according to a variation of the electrical property. |
申请公布号 |
US2012174360(A1) |
申请公布日期 |
2012.07.12 |
申请号 |
US201213418669 |
申请日期 |
2012.03.13 |
申请人 |
SATO TAKEO;NAGAMINE YUICHIRO;MURATA MANUFACTURING CO., LTD. |
发明人 |
SATO TAKEO;NAGAMINE YUICHIRO |
分类号 |
H01L41/22 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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