| 摘要 |
<p>A method for producing a micromechanical component, includes providing a first substrate, developing a micropattern on the first substrate, the micropattern having a movable functional element, providing a second substrate, and developing an electrode in the second substrate for the capacitive recording of a deflection of the functional element. The method further includes connecting the first and the second substrate, a closed cavity being formed which encloses the functional element, and the electrode bordering on the cavity in an area of the functional element.</p> |
