METHOD OF MANUFACTURING LIGHT EMITTING DIODE USING NANO-STRUCTURE AND LIGHT EMITTING DIODE MANUFACTURED THEREBY

摘要

PURPOSE: A method for manufacturing a light emitting diode using a nanostructure and a light emitting diode manufactured thereby are provided to improve light extraction efficiency through dry etching using a nanostructure. CONSTITUTION: An active layer and a second semiconductor layer are successively formed on a first semiconductor layer. A spherical nanostructure is coated on the second semiconductor layer(S10). The second semiconductor layer is dried and etched by using the nanostructure as a mask(S20). An uneven portion is formed on the second semiconductor layer(S30). Fine patterning is performed so that a sub uneven portion is formed on each uneven surface constituting the uneven portion by wet-etching the uneven portion(S40).