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发明名称
Apparatus for cleaning substrate using brush
摘要
申请公布号
KR101163584(B1)
申请公布日期
2012.07.09
申请号
KR20090030383
申请日期
2009.04.08
申请人
发明人
分类号
B08B1/02;B08B1/04;B08B3/04;H01F7/14
主分类号
B08B1/02
代理机构
代理人
主权项
地址
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