发明名称 CHARGED BODY, AND FIELD EFFECT TRANSISTOR AND MEMORY DEVICE USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a simple charged body enabling a memory device to be manufactured by printing and coating without requiring an ultra-thin insulating layer, such as a floating gate memory and an MNOS (metal-nitride-oxide-silicon) memory and the like, and whose injection charge amount can be easily controlled, and to provide an FET and a memory device enabling threshold voltage control and being capable of holding a controlled threshold voltage state for a long time by producing the FET by using the charged body as a gate insulation film. <P>SOLUTION: A charged body is configured by an insulation object obtained by laminating two kinds of insulators of an insulator (hereinafter, referred to as a high charge injection withstanding voltage material) whose electric field intensity at which charge injection occurs (hereinafter, referred to as a charge injection withstanding voltage) and an insulating withstanding voltage are E<SB POS="POST">CI,H</SB>and E<SB POS="POST">BH</SB>, respectively, and an insulator (hereinafter, referred to as a low charge injection withstanding voltage material) whose charge injection withstanding voltage E<SB POS="POST">CI,L</SB>satisfies a relationship of E<SB POS="POST">CI,L</SB><E<SB POS="POST">Cl,H</SB>. A voltage is applied to two electrodes contacting with the high charge injection withstanding voltage material and the low charge injection withstanding voltage material respectively and being separated from each other at an electric field intensity satisfying E<SB POS="POST">CI,L</SB><¾E¾<E<SB POS="POST">BH</SB>to inject electric charge into the insulators from the low charge injection withstanding voltage material side and to charge the insulators. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012129411(A) 申请公布日期 2012.07.05
申请号 JP20100280686 申请日期 2010.12.16
申请人 HITACHI CHEM CO LTD 发明人 NAKAKO TAKEO;YAMAMOTO KAZUNORI;KAMISHIRO YASUSHI
分类号 H01L29/792;H01L21/336;H01L21/8247;H01L27/115;H01L27/28;H01L29/786;H01L29/788;H01L51/05 主分类号 H01L29/792
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