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发明名称
Device for producing thin metal layers by ion neutralization
摘要
申请公布号
GB939275(A)
申请公布日期
1963.10.09
申请号
GB19610024396
申请日期
1961.07.06
申请人
CESKOSLOVENSKA AKADEMIE VED
发明人
分类号
C23C14/34;H01B1/00;H01J37/32;H01J37/34
主分类号
C23C14/34
代理机构
代理人
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