发明名称 |
Optical system of a microlithographic projection exposure apparatus |
摘要 |
An optical system of a microlithographic projection exposure apparatus contains a module, which can be fitted in the optical system and removed from it as a unit. The module contains a cavity which can be completely filled with a liquid and hermetically sealed, and a concavely curved optical surface which bounds the cavity at the top during operation of the projection exposure apparatus. This makes it possible to fill the module outside the optical system. The module can be tilted there so that no air bubble, which prevents complete filling, can form below the concavely curved optical surface. |
申请公布号 |
US8212991(B2) |
申请公布日期 |
2012.07.03 |
申请号 |
US20090628294 |
申请日期 |
2009.12.01 |
申请人 |
DODOC AURELIAN;EHRMANN ALBRECHT;BLEIDISTEL SASCHA;CARL ZEISS SMT GMBH |
发明人 |
DODOC AURELIAN;EHRMANN ALBRECHT;BLEIDISTEL SASCHA |
分类号 |
G03B27/42;G03B27/58;G03B27/68 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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