METHOD FOR FORMING FINE ELECTRODE GAP ON A FLEXIBLE SUBSTRATE
摘要
<p>PURPOSE: A method for forming a fine electrode gap on a flexible substrate is provided to simplify a process by additionally forming an extended electrode on one side of an electrode using a shadow effect. CONSTITUTION: An electrode layer is formed on a plurality of preset areas on a flexible substrate(S110). A substrate angle is controlled at a preset angle(S120). An extended electrode layer is formed on a preset area between electrode layers using a shadow effect(S130). Deposition time is controlled according to preset time to control the thickness of the extended electrode layer(S140).</p>
申请公布号
KR20120069107(A)
申请公布日期
2012.06.28
申请号
KR20100130511
申请日期
2010.12.20
申请人
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
发明人
KIM, GYU TAE;JEON, DAE YOUNG;PARK, SO JEONG;KIM, YUN JEONG