| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent decrease in treatment efficiency in a gas ejection treatment apparatus that ejects gas from above and below a treatment object. <P>SOLUTION: The gas ejection treatment apparatus includes: a housing; a conveyer 20 having air permeability and conveying a treatment object W in the housing; and a plurality of upper nozzles 40a/lower nozzles 40b which are disposed in an upper chamber 30a/lower chamber 30b positioned above/below the conveyer 20, respectively, have cylindrical shapes facing downward/upward, and inject gas in the respective chambers 30a/30b. The upper nozzle 40a and the lower nozzle 40b are not aligned on the same vertical line. The upper nozzles 40a are disposed at an equal spacing on the upper chamber 30a; the lower nozzles 40b are disposed at positions corresponding to the intermediate positions of the adjoining upper nozzles 40a, at an equal spacing on the lower chamber 30b. <P>COPYRIGHT: (C)2012,JPO&INPIT |
