发明名称 METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT HAVING A VOLUME-ELASTIC MEDIUM AND MICROMECHANICAL COMPONENT
摘要 A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.
申请公布号 US2012144915(A1) 申请公布日期 2012.06.14
申请号 US201213402626 申请日期 2012.02.22
申请人 RATZEL WOLF-INGO;OHL CHRISTIAN;KURLE JUERGEN 发明人 RATZEL WOLF-INGO;OHL CHRISTIAN;KURLE JUERGEN
分类号 G01P15/00;G01D11/24;G01L7/00 主分类号 G01P15/00
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