发明名称 LONGITUDINAL RESONATING MODE INERTIAL MASS SENSING SYSTEMS
摘要 The subject invention provides improved means to measure mass collected on a sample collection surface in real time. A resonant structure is used as the “scale” to determine the mass in real time. The invention employs a membrane, or collection substrate, on the end of a resonant structure resonating in the longitudinal direction. A structure resonating in the longitudinal mode offers a considerably higher resonant frequency than the same structure in the bending mode. The higher the resonant frequency, the more resolution in the frequency of oscillation is available to determine the mass of the collection surface or membrane. The present invention implements this attribute in connection with such a structure.
申请公布号 US2012144918(A1) 申请公布日期 2012.06.14
申请号 US201113312861 申请日期 2011.12.06
申请人 发明人 KORPI DAVID M.
分类号 G01G3/16 主分类号 G01G3/16
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