| 摘要 |
An apparatus and a method of separating a substrate are provided to save energy by separating a growth layer from a growth substrate in a separating chamber under the atmosphere of low pressure or vacuum. A method of separating a substrate includes the steps of: providing a growth substrate(10) and a growth layer(20), which is coupled with each other, to a separating chamber(110) having a light transmitting unit(112); maintaining the inside of the separating chamber as the atmosphere of high temperature and low pressure; and separating the growth layer and the growth substrate from the inside of the separating chamber by irradiating laser through the light transmitting unit.
|
