发明名称 THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING SAME, ACTIVE MATRIX SUBSTRATE, DISPLAY PANEL AND DISPLAY DEVICE
摘要 The present invention provides a thin film transistor including an oxide semiconductor layer (4) for electrically connecting a signal electrode (6a) and a drain electrode (7a), the an oxide semiconductor layer being made from an oxide semiconductor; and a barrier layer (6b) made from at least one selected from the group consisting of Ti, Mo, W, Nb, Ta, Cr, nitrides thereof, and alloys thereof, the barrier layer (6b) being in touch with the signal electrode (6a) and the oxide semiconductor layer (4) and separating the signal electrode (6a) from the oxide semiconductor layer (4). Because of this configuration, the thin film transistor can form and maintain an ohmic contact between the first electrode and the channel layer, thereby being a thin film transistor with good properties.
申请公布号 US2012138923(A1) 申请公布日期 2012.06.07
申请号 US201013379670 申请日期 2010.04.06
申请人 HARA TAKESHI;NISHIKI HIROHIKO;CHIKAWA YOSHIMASA;NAKAGAWA KAZUO;OHTA YOSHIFUMI;AITA TETSUYA;SUZUKI MASAHIKO;NAKAGAWA OKIFUMI;MIYAJIMA YOSHIYUKI;MIZUNO YUUJI;MIZUNO HINAE;TAKEI MICHIKO;HARUMOTO YOSHIYUKI;SHARP KABUSHIKI KAISHA 发明人 HARA TAKESHI;NISHIKI HIROHIKO;CHIKAWA YOSHIMASA;NAKAGAWA KAZUO;OHTA YOSHIFUMI;AITA TETSUYA;SUZUKI MASAHIKO;NAKAGAWA OKIFUMI;MIYAJIMA YOSHIYUKI;MIZUNO YUUJI;MIZUNO HINAE;TAKEI MICHIKO;HARUMOTO YOSHIYUKI
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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