发明名称 HOT ZONE DEVICE
摘要 The present invention relates to a hot zone device for use in a crystal-growing furnace. The hot zone device has a gas inlet. The gas inlet is mounted in an insulation layer at a position above the crucible in a manner protruding into an interior of the crucible. The insulation layer is formed with a gas exit. The gas inlet is positioned such that the opening thereof is spaced apart from the free surface of the melt contained in the crucible by a distance substantially equal to or shorter than 10 cm, so as to allow the free surface of the melt to be blown by the guided gas flow in such a manner that the gas flow takes the impurity away from the free surface efficiently. As a result, the crystal ingot obtained by solidifying the melt will exhibit a reduced concentration of impurities and an improved crystal quality.
申请公布号 US2012137976(A1) 申请公布日期 2012.06.07
申请号 US20100958475 申请日期 2010.12.02
申请人 CHEN JYH-CHEN;TENG YING-YANG;LU CHUNG-WEI;CHEN HSUEH-I 发明人 CHEN JYH-CHEN;TENG YING-YANG;LU CHUNG-WEI;CHEN HSUEH-I
分类号 C23C16/455 主分类号 C23C16/455
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