发明名称 |
Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
摘要 |
A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body.
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申请公布号 |
US8193011(B2) |
申请公布日期 |
2012.06.05 |
申请号 |
US201113277112 |
申请日期 |
2011.10.19 |
申请人 |
KANG HEE-CHEOL;PARK HYUN-SOOK;RYU JAE-KWANG;CHOI YONG-SUP;LEE YUN-MI;KIM SANG-SOO;SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
KANG HEE-CHEOL;PARK HYUN-SOOK;RYU JAE-KWANG;CHOI YONG-SUP;LEE YUN-MI;KIM SANG-SOO |
分类号 |
H01L33/26;C23C16/00;C23C16/44;H01L21/76 |
主分类号 |
H01L33/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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