| 发明名称 |
Effluent gas recovery system in polysilicon and silane plants |
| 摘要 |
Purified SiHCl3 and/or SiCl4 are used as a sweep gas across a permeate side of a gas separation membrane receiving effluent gas from a polysilicon reactor. The combined sweep gas and permeate is recycled to the reactor. |
| 申请公布号 |
US8187361(B2) |
申请公布日期 |
2012.05.29 |
| 申请号 |
US20090497533 |
申请日期 |
2009.07.02 |
| 申请人 |
GADRE SARANG;KOSURI MADHAVA R.;AMERICA AIR LIQUIDE, INC. |
发明人 |
GADRE SARANG;KOSURI MADHAVA R. |
| 分类号 |
B01D53/22;B01D50/00;B01D53/02;C01B33/02;C01B33/107 |
主分类号 |
B01D53/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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