发明名称 HIGH EFFICIENCY SUSCEPTOR AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A high efficiency susceptor and a manufacturing method thereof are provided to reduce a manufacturing time comparing to a welding method by coining a susceptor body on an outer surface of an intermediate shaped body by a casting process. CONSTITUTION: A thin plate case(42) for shaping includes a filling space. A hotwire(20) is arranged in the filling space of the thin plate case for shaping into a bent shape. A heat transfer matter(30) is filled in the fill space of the thin plate case for shaping. A thin plate cover(46) is mounted on an opening portion of the thin plate case for shaping. A susceptor body(10) is formed on the outer surface of the thin plate cover and the thin plate case for shaping.
申请公布号 KR101147998(B1) 申请公布日期 2012.05.24
申请号 KR20110118221 申请日期 2011.11.14
申请人 POTON 发明人 HAN, TAE MAN
分类号 H01L21/683;B22D15/00;C23C16/458;H01L21/205 主分类号 H01L21/683
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