发明名称 |
HIGH EFFICIENCY SUSCEPTOR AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A high efficiency susceptor and a manufacturing method thereof are provided to reduce a manufacturing time comparing to a welding method by coining a susceptor body on an outer surface of an intermediate shaped body by a casting process. CONSTITUTION: A thin plate case(42) for shaping includes a filling space. A hotwire(20) is arranged in the filling space of the thin plate case for shaping into a bent shape. A heat transfer matter(30) is filled in the fill space of the thin plate case for shaping. A thin plate cover(46) is mounted on an opening portion of the thin plate case for shaping. A susceptor body(10) is formed on the outer surface of the thin plate cover and the thin plate case for shaping.
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申请公布号 |
KR101147998(B1) |
申请公布日期 |
2012.05.24 |
申请号 |
KR20110118221 |
申请日期 |
2011.11.14 |
申请人 |
POTON |
发明人 |
HAN, TAE MAN |
分类号 |
H01L21/683;B22D15/00;C23C16/458;H01L21/205 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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