发明名称 |
CHARGED-PARTICLE ENERGY ANALYZER |
摘要 |
One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh. |
申请公布号 |
EP2454749(A2) |
申请公布日期 |
2012.05.23 |
申请号 |
EP20100800621 |
申请日期 |
2010.07.16 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
SHADMAN, KHASHAYAR;HAYNES, ROBERT;TOTH, GABOR, D;SEARS, CHRISTOPHER;NASSER GHODSI, MEHRAN |
分类号 |
H01J37/28;H01J37/05;H01J37/244 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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