摘要 |
An apparatus for fracturing polycrystalline silicon having: a pair of rolls which are rotated in a counter direction each other around parallel axes; a plurality of fracturing teeth which are provided on and protruded radially-outwardly from outer peripheral surfaces of the rolls, and are made from cemented carbide or silicon material; and resin covers being wound around the roll in a state in which the fracturing teeth penetrate thereof so as to cover the outer peripheral surfaces of the rolls, and fractures fragments of polycrystalline silicon between the rolls. |