ALIGNMENT METHOD, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an alignment method capable of highly precisely positioning a substrate placed on a stage.

SOLUTION: This alignment method for positioning a substrate placed on a table includes steps for: detecting a substrate mark formed on the surface of the substrate along a first direction; acquiring position information of the substrate mark along the surface of the substrate related to a second direction that is orthogonal to the first direction, based on the detection result of the substrate mark; calculating an offset amount of the position of the substrate based on a reference position information of the substrate mark and the position information related to the second direction; and moving the table on which the substrate is placed, based on the offset amount of the position of the substrate.

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