Device for coating of surfaces e.g. metal surface, comprises burner with burner input and burner output having precursor feeding unit for supplying precursor into burner, and gas supply unit for supplying carrier gas and/or fuel gas

摘要

The device comprises a burner (2) with a burner input (2.1) and a burner output (2.2) having a precursor feeding unit (3) for supplying a precursor into the burner, a gas supply unit (4) for supplying a carrier gas and/or fuel gas, and a settling unit with a cavity for reducing turbulence of a precursor flow, where a power output side is arranged downstream of the precursor feeding unit and a power input side is arranged upstream of the burner input. The settling unit is arranged at the power output side after the gas supply unit, and the power input side is arranged before the burner input. The device comprises a burner (2) with a burner input (2.1) and a burner output (2.2) having a precursor feeding unit (3) for supplying a precursor into the burner, a gas supply unit (4) for supplying a carrier gas and/or fuel gas, and a settling unit with a cavity for reducing turbulence of a precursor flow, where a power output side is arranged downstream of the precursor feeding unit and a power input side is arranged upstream of the burner input. The settling unit is arranged at the power output side after the gas supply unit, and the power input side is arranged before the burner input. The settling unit comprises input ports for supplying the precursor, the carrier gas and/or the fuel gas, where the input port or the input ports is or are arranged such that the precursor is coaxially flowing around within the cavity by the carrier gas and/or the fuel gas. A first input port is disposed in a center of a lid of the settling unit and coupled to the feeding unit with the precursor. A second input port is formed between an edge region of the lid of the settling unit and a wall region of the settling unit and coupled with the gas supply unit. A third input port is formed in the edge region of the lid of the settling unit and connected to the gas supply unit. The precursor feeding unit comprises a binary nozzle, where the precursor and an atomization medium are fed by the binary nozzle. An independent claim is included for a method of coating surfaces.