发明名称 METHOD OF PROVIDING A FLEXIBLE SEMICONDUCTOR DEVICE AT HIGH TEMPERATURES AND FLEXIBLE SEMICONDUCTOR DEVICE THEREOF
摘要 Some embodiments include a method of providing a semiconductor device. The method can include: (a) providing a flexible substrate; (b) depositing at least one layer of material over the flexible substrate, wherein the deposition of the at least one layer of material over the flexible substrate occurs at a temperature of at least 180° C.; and (c) providing a diffusion barrier between a metal layer and an a-Si layer. Other embodiments are disclosed in this application.
申请公布号 KR20120047872(A) 申请公布日期 2012.05.14
申请号 KR20117031580 申请日期 2010.05.28
申请人 ARIZONA BOARD OF REGENTS FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY 发明人 O'ROURKE SHAWN;MOYER CURTIS;AGENO SCOTT;BOTTESCH DIRK;O'BRIEN BARRY;MARRS MICHAEL
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
主权项
地址