发明名称 |
METHOD OF PROVIDING A FLEXIBLE SEMICONDUCTOR DEVICE AT HIGH TEMPERATURES AND FLEXIBLE SEMICONDUCTOR DEVICE THEREOF |
摘要 |
Some embodiments include a method of providing a semiconductor device. The method can include: (a) providing a flexible substrate; (b) depositing at least one layer of material over the flexible substrate, wherein the deposition of the at least one layer of material over the flexible substrate occurs at a temperature of at least 180° C.; and (c) providing a diffusion barrier between a metal layer and an a-Si layer. Other embodiments are disclosed in this application. |
申请公布号 |
KR20120047872(A) |
申请公布日期 |
2012.05.14 |
申请号 |
KR20117031580 |
申请日期 |
2010.05.28 |
申请人 |
ARIZONA BOARD OF REGENTS FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY |
发明人 |
O'ROURKE SHAWN;MOYER CURTIS;AGENO SCOTT;BOTTESCH DIRK;O'BRIEN BARRY;MARRS MICHAEL |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|