| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor of a small size which has a high Q factor and high detection sensitivity, and an electronic device including such physical quantity sensor. <P>SOLUTION: A physical quantity sensor 1 includes: four vibration portions 51 to 54; four substrate fixed portions 61 to 64 which are located in directions in which each radial direction from a center point O of an assembly including the four vibration portions 51 to 54 forms an angle of 45 degrees with respect to each of an X axis and a Y axis; two-spring mechanisms 711 to 742 which extend, respectively from the substrate fixed portions 61 to 64, to two vibration portions being adjacent to each other around a Z axis; and vibration means 4 which vibrates first vibration portions 51 and 52 in an X direction in phases opposite to each other while vibrating second vibration portions 53 and 54 in a Y direction in phases opposite to each other. Further, the two-spring mechanisms are brought into tuning fork vibration in X and Y planes in response to the vibration of the vibration portions 51 to 54. <P>COPYRIGHT: (C)2012,JPO&INPIT |
