| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor capable of reducing breakage of and damage to a circuit part due to a crack. <P>SOLUTION: A flow sensor 10 according to one embodiment of the present invention comprises a base 20 having a cavity on its one side and a thin film 30 provided on the other side of the base 20. The thin film 30 has a circuit (a heater 31, an upstream temperature measuring resistance element 32, and a downstream temperature measuring resistance element 33) for detecting a predetermined physical quantity, and includes a bridge part 36 being bridged over the cavity 25, a periphery part 37 being fixed to the base 20 and supporting the bridge 36, and openings being surrounded by the periphery part 37 and the bridge part 36 and communicating with the cavity. Slits are formed in the bridge 36 at connection parts to the periphery part 37. <P>COPYRIGHT: (C)2012,JPO&INPIT |
