SUBLIMATE SOURCE OF EVAPORATED MATERIAL FOR MOLECULAR BEAM EPITAXY INSTALLATION

摘要

FIELD: electricity. ^ SUBSTANCE: sublimate source of evaporated material for molecular beam epitaxy installation includes evaporated material carrier fixed on current leads where end of each current lead contains plate in which hole is made and carrier is made as bar with tapered ends and installed with its tapered ends in the holes made in plates. ^ EFFECT: simplification of manufacturing and lowering material consumption for manufacturing evaporated element with increase in its dimensions and providing high purity and high density of crated flow of evaporated material, as well as prevention of destruction and providing simplicity of evaporated element replacement. ^ 2 cl, 2 dwg