| 摘要 |
<p>Disclosed is a charging device capable of charging a dielectric material to a high surface potential stable over time by means of a short-duration charging process. The charging device is configured to include a reaction chamber (12), a UV irradiation means (14), an electrode (16) and a vacuum pump (18). A dielectric material (20) is arranged on the electrode (16), and a constant flow of gas such as nitrogen is supplied from a gas supply tube (22) through a flow control device (30). A pressure adjustment valve (34) is adjusted and the vacuum pump (18) reduces the pressure in the reaction chamber (12) to achieve a prescribed pressure. Under the above conditions, a voltage is applied to the electrode (16) and the gas is excited by irradiation of UV rays from the UV irradiation means (14). The generated electrons, moved in the direction of the dielectric material (20) by means of the electric field generated by the electrode (16), charge the dielectric material (20) upon reaching the surface in said direction of the dielectric material (20). The time required for charging processing is 2 seconds or less, and electrets can be manufactured in a short time.</p> |
