发明名称 |
Method and system for evaluating a variation in a parameter of a pattern |
摘要 |
A method and system are presented for evaluating a variation of a parameter of a pattern. The method includes processing data indicative of an aerial intensity image of at least a portion of a patterned article, and determining values of a certain functional of the aerial image intensity for predetermined regions within the at least portion of the patterned article. The values of the aerial image intensity functional are indicative of a variation of at least one parameter of the pattern within the at least portion of the patterned article or are indicative of a variation of at least one parameter of a pattern manufactured by utilizing the patterned article. |
申请公布号 |
US8160350(B2) |
申请公布日期 |
2012.04.17 |
申请号 |
US20070994412 |
申请日期 |
2007.02.01 |
申请人 |
YISHAI MICHAEL BEN;WAGNER MARK;BARTOV AVISHAI;GREENBERG GADI;SHOVAL LIOR;GVIRTZER OPHIR;APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
YISHAI MICHAEL BEN;WAGNER MARK;BARTOV AVISHAI;GREENBERG GADI;SHOVAL LIOR;GVIRTZER OPHIR |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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