| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of improving yield by preventing the occurrence of resist residue even if the center interval between columnar electrodes is small. <P>SOLUTION: A semiconductor device comprises a semiconductor substrate, wiring that is provided on the semiconductor substrate and has lands, and columnar electrodes provided on the lands. The shape of the surface, contacting the land, of each columnar electrode has three or more salients 20b composed of convex curves and sides composed of concave curves 20c connecting each of the salients. <P>COPYRIGHT: (C)2012,JPO&INPIT |
