| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a perpendicular magnetic recording medium, which enables multi-layering of soft magnetic backing layers without increasing number of vacuum chambers and number of sputter targets, and effectively reduces noise caused by the soft magnetic backing layers. <P>SOLUTION: A manufacturing method of a perpendicular magnetic recording medium containing at least a non-magnetic substrate 10, a compound type soft magnetic backing layer 20, and a magnetic recording layer 50, has a step of forming the compound type soft magnetic backing layer 20 with lamination of n layers of amorphous soft magnetic material 22 and (n-1) layers of non-magnetic binding material 24 in a deposition device with a multipolar cathode in a single vacuum chamber. Each of the (n-1) layers of non-magnetic binding material is formed between two layers of the amorphous soft magnetic material, where n represents an integer equal to or greater than two. <P>COPYRIGHT: (C)2012,JPO&INPIT |
