ION DOPING APPARATUS AND ION DOPING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ion doping apparatus for doping with only hydrogen ions with the same mass with a simple apparatus structure having no mass separation function, and provide an ion doping method thereof.

SOLUTION: When hydrogen is introduced to a plasma chamber including a dielectric plate as a part of an outer wall and a surface wave is generated at the dielectric plate by microwaves, a region is formed where negative ions of hydrogen are easily generated. Since all the generated negative ions have a molecular mass of 1, only the ions with the same mass can be added to a target by applying an electric field without mass separation.

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