发明名称 |
DIAPHRAGM CHANGING DEVICE |
摘要 |
The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2. |
申请公布号 |
US2012075611(A1) |
申请公布日期 |
2012.03.29 |
申请号 |
US201113307550 |
申请日期 |
2011.11.30 |
申请人 |
BIEG HERMANN;BISCHOFF THOMAS;NGUYEN UY-LIEM;XALTER STEFAN;WILL MARCUS;KWAN YIM-BUN PATRICK;MUEHLBEYER MICHAEL;CARL ZEISS SMT GMBH |
发明人 |
BIEG HERMANN;BISCHOFF THOMAS;NGUYEN UY-LIEM;XALTER STEFAN;WILL MARCUS;KWAN YIM-BUN PATRICK;MUEHLBEYER MICHAEL |
分类号 |
G03B27/72;G02B5/00;G02B13/14;G03F7/20 |
主分类号 |
G03B27/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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