| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conveyance device in which an attitude of a holding base can be accurately controlled and the holding base is prevented from wobbling even when being moved at high speed. <P>SOLUTION: The conveyance device includes a first attitude holding link 56 and a second attitude holding link 57. One end of a first attitude holding link 56 and one end of a second attitude holding link 57 are rotatably connected by a connecting shaft 53. Rails 51, 52 are mounted to a base plate 27 of the holding base 21. Rollers 54, 55 are mounted to the connecting shaft 53 to be able to rotate around a prescribed axis. The rollers 54, 55 are arranged to contact with roller rolling parts 51a, 52a of the rails 51, 52. When the holding base 21 is moved, the rollers 54, 55 roll on the roller rolling parts 51a, 52a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
