OPTOELECTRONIC DEVICE HAVING VERTICAL SLABS, METHOD OF MANUFACTURING THE SAME, AND OPTICAL MODULATOR HAVING THE SAME

摘要

PURPOSE: An optoelectronic device, a manufacturing method thereof and a light modulator including the same are provided to simplify manufacturing process by forming an optical guide core region and a plurality of slabs at the same. CONSTITUTION: A p-doped region(122) and an n-doped region(124) are formed within a semiconductor substrate. An optical guide core region is formed between the p-doped region and the n-doped region. A plurality of first slabs(114) is formed between the optical guide core region and the p-doped region. A plurality of second slabs(118) is formed between the optical guide core region and the n-doped region. The thickness of the plurality of second slabs is same with the thickness of the optical guide core region.