| 摘要 |
<p>A clean stocker (100) provided with: a rotary reticle rack (111) and rotary empty-pod rack (112) that store reticles and pods separately; a manual loading port (160) via which reticle-containing pods are supplied to an operator; a rotary reticle-containing-pod rack (113) that temporarily stores reticle-containing pods; a detection unit (180) that detects instructions from the operator; a pod opener (140) that, when a first instruction is detected, obtains a reticle from the rotary reticle rack (111), obtains an empty pod from the rotary empty-pod rack (112), and stores the obtained reticle in the empty pod; and a pod transport device (130) that places reticle-containing pods on the rotary reticle-containing-pod rack (113), and when a second instruction is detected, moves a reticle-containing pod from the rotary reticle-containing-pod rack (113) to the manual loading port (160).</p> |
