A target assembly includes a base comprising a first surface and a second surface opposite to the first surface. The base defining a threaded hole; a magnetron mounted on a first surface; a target movably mounted to the second surface, the target defining an opening corresponding to the threaded hole, the opening including a first end and a second end; and a screw. The screw can slide in the opening from the first end to the second end so the position between magnetron and the target is adjusted to adjust the bombarded area of the target.
申请公布号
US2012067721(A1)
申请公布日期
2012.03.22
申请号
US201113084646
申请日期
2011.04.12
申请人
CHANG HSIN-PEI;CHEN WEN-RONG;CHIANG HUANN-WU;CHEN CHENG-SHI;LIN SHUN-MAO;HON HAI PRECISION INDUSTRY CO., LTD.;HONG FU JIN PRECISION INDUSTRY (SHENZHEN) CO., LTD.