| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray irradiation device, which is operable to stably apply X rays to an object to be irradiated while suppressing the change of the distance between a focal point of the X rays and the object to be irradiated. <P>SOLUTION: An X-ray irradiation device 1 includes: an electron-emission part 2; a target part T including a base plate 21 and a target body 23 buried in the base plate 21 and made of a material which generates X rays in response to incidence of electrons; a bellows BE; a top plate 20; and a holding part 30. The electron-emission part 2 has an electron gun 3, and a cylindrical part 5 which houses the electron gun 3 and includes an electron path 11, the inside of which is to be kept in a vacuum condition in operation. The bellows BE connects between the target part T and the electron-emission part 2, has elasticity, and defines a space which communicates with the electron path 11 and is to be kept in a vacuum condition. In the bellows, at least a part facing the space has electrical conductivity. The holding part 30 serves to hold an object to be irradiated with X rays generated by the target body. The top plate 20 has a reference plane on which the target part T and the holding part 30 are provided. <P>COPYRIGHT: (C)2012,JPO&INPIT |
