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发明名称
VERFAHREN ZUM HERSTELLEN VON AUS ALUMINIUMOXID BESTEHENDEN DIELEKTRISCHEN ISOLATIONSZONEN IN INTEGRIERTEN SCHALTUNGEN
摘要
申请公布号
DE2628382(A1)
申请公布日期
1977.01.27
申请号
DE19762628382
申请日期
1976.06.24
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
ROBERT POPONIAK,MICHAEL;OTTO SCHWENKER,ROBERT
分类号
H01L21/76;H01L21/316;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
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