| 摘要 |
A thin film (11) detection electrode (10) is formed on an insulating substrate (13). The resulting detection electrodes (10) are light-weight, and have a very high dimensional accuracy so that the number of the parts supporting the detection electrodes (10) is small and the size of the detection electrodes (10) becomes very small. By an increase in the dimensional accuracy of the detection electrodes (10), reduction in insulating properties due to a water content in a insulating gas can be measured in addition to measurement of electromagnetic wave. |
