| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform a detection of a position deviation value for without causing a problem of memory capacity, and to perform the visual inspection of a substrate by correcting the position of the substrate based on the position deviation value. <P>SOLUTION: On the basis of a reference table 424, an estimated reference point position is set by an estimated reference point position setting part 413, and a temporary reference point position is set by a temporary reference point position setting part 415. A standard deviation of a distance between the estimated reference point position and the temporary reference point position is determined by a distance index value calculation part 414, and the angle of rotation when the standard deviation becomes the minimum and a position difference value between the temporary reference point position and a reference point position is acquired as a position deviation value 425. An alignment of a substrate 6 to be inspected is performed based on the position deviation value 425 so that the alignment and visual inspection of the substrate can be surely performed without increasing the use capacity of a memory. <P>COPYRIGHT: (C)2012,JPO&INPIT |
