发明名称 RESIST PATTERN FORMING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a pattern forming method for a photosensitive substance using simple and inexpensive devices and equipment, the photosensitive substance having a uniform film thickness with a steep cross section side wall and being usable as a female mold for plating, a microchannel and a container. <P>SOLUTION: A pattern forming method for a photosensitive substance is performed as follows. First, the photosensitive substance is applied onto a substrate thickly with a uniform thickness. Then, on the photosensitive substance, a light-shielding pattern to become a base is formed using a light shielding liquid by means of a dispenser, an ink-jet printer or screen printing. Thereafter, the photosensitive substance is exposed to light using the light-shielding pattern as a masking material. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012048183(A) 申请公布日期 2012.03.08
申请号 JP20100204886 申请日期 2010.08.27
申请人 TOKYO DENKI UNIV 发明人 HORIUCHI TOSHIYUKI
分类号 G03F7/20;B81C1/00;H01L21/027 主分类号 G03F7/20
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