发明名称 |
SEALING TYPE DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sealing type device and a method for manufacturing the sealing type device. <P>SOLUTION: A sealing type device of this invention includes: a first substrate having a fixed part and a movable part located on the inner side of the fixed part; a second substrate covering above the fixed part and the movable part of the first substrate; a first sealing member located between the fixed part of the first substrate and the second substrate and sealing a space between the first substrate and the second substrate; and a second sealing member located between the fixed part of the first substrate and the second substrate and sealing the space between the first substrate and the second substrate at an outer peripheral part of the first sealing member. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012049335(A) |
申请公布日期 |
2012.03.08 |
申请号 |
JP20100190095 |
申请日期 |
2010.08.26 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
MORII AKIO |
分类号 |
H01L23/02;B81B3/00;B81C3/00;G01P15/08;H01L23/08;H01L23/10;H01L29/84 |
主分类号 |
H01L23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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